Methods and apparatus comprising a first conduit circumscribed by a second conduit

ABSTRACT

A fluid distributor comprises a first conduit extending along a first elongated axis and a second conduit circumscribing the first conduit. A first area comprises a cross-sectional flow area of the first conduit taken perpendicular to the first elongated axis. The first conduit comprises a first plurality of orifices comprising a first combined cross-sectional area. The second conduit comprises a second plurality of orifices comprising a second combined cross-sectional area. A first ratio of the first area to the first combined cross-sectional area can be about 2 or more. A second ratio of the first combined cross-sectional area to the second combined cross-sectional area can be about 2 or more. An angle between a direction of an orifice axis of a first orifice of the first plurality of orifices and a direction of an orifice axis of a first orifice of the second plurality of orifices can be from about 45° to 180°.

This application claims the benefit of priority under 35 U.S.C. § 119 ofU.S. Provisional Application Ser. No. 62/756,265, filed on Nov. 6, 2018,the content of which is relied upon and incorporated herein by referencein its entirety.

The present disclosure relates generally to fluid distributors andmethods for using the same to deposit a layer and, more particularly, tofluid distributors comprising a first conduit circumscribed by a secondconduit and methods for using the same to deposit a layer.

BACKGROUND

Known fluid distributors fail to distribute fluid uniformly. Indeposition methods, nonuniform fluid distribution can lead to variationsin thickness of the deposited layer. In optical applications involvingcarefully tuned interference stacks or other applications, suchvariation can lead to unacceptably low yield rates. Additionally,variations in thickness can produce internal stress distributions thatcan impair the functionality of the resulting device. Example devicescan include liquid crystal displays (LCDs), electrophoretic displays(EPD), organic light emitting diode displays (OLEDs), plasma displaypanels (PDPs), and touch sensors.

Also, known fluid distributors may distribute fluid that is notwell-mixed. In reactive deposition methods, this can produce layers withvariations in stoichiometry. For optical applications, variations instoichiometry can correspond to variations in refractive index. In highperformance optical devices such as those listed above, such variationsmay be noticeable by consumers.

Accordingly, there is a need for new fluid distributors, whichdistribute well-mixed fluids with substantially uniform stoichiometryand mass-flow rates. Such fluid distributors are needed to increasedeposition yield rates and enable new technologies requiring moreuniform distributions.

SUMMARY

There are set forth fluid distributors comprising a first conduitcircumscribed by a second conduit that can be used to deposit a layerwith substantially uniform thickness and substantially uniformstoichiometry. Some example embodiments of the disclosure are describedbelow with the understanding that any of the embodiments may be usedalone or in combination with one another.

Embodiment 1

A fluid distributor comprises a first conduit that can extend along afirst elongated axis and a second conduit that may circumscribe thefirst conduit. The first conduit can comprise a first flow areacomprising a cross-sectional area taken perpendicular to the firstelongated axis. Also, the first conduit can comprise a first pluralityof orifices comprising a first combined cross-sectional flow area. Afirst ratio of the first cross-sectional area to the first combinedcross-sectional flow area can be about 2 or more. A first orifice of thefirst plurality of orifices may comprise an orifice axis that isperpendicular to the first elongated axis. The second conduit can extendalong a second elongated axis. The second conduit can comprise a secondplurality of orifices comprising a second combined cross-sectional flowarea. A second ratio of the first combined cross-sectional flow area ofthe first plurality of orifices to the second combined cross-sectionalflow area of the second plurality of orifices can be about 2 or more. Afirst orifice of the second plurality of orifices may comprise anorifice axis that can be perpendicular to the second elongated axis. Afirst angle between a direction of the orifice axis of the first orificeof the first plurality of orifices and a direction of the orifice axisof the first orifice of the second plurality of orifices can be in arange from about 45° to about 180°.

Embodiment 2

The fluid distributor of embodiment 1, where the first ratio is greaterthan the second ratio.

Embodiment 3

The fluid distributor of embodiment 1 or embodiment 2, where the firstangle is in a range from about 90° to about 180°.

Embodiment 4

The fluid distributor of any one of embodiments 1-3, where the firstangle is in a range from about 90° to about 135°.

Embodiment 5

The fluid distributor of any one of embodiments 1-3, where the firstangle is in a range from about 170° to about 180°.

Embodiment 6

The fluid distributor of any one of embodiments 1-5, where the firstplurality of orifices is staggered relative to the second plurality oforifices in a direction of the first elongated axis.

Embodiment 7

The fluid distributor of any one of embodiments 1-6, where the firstconduit comprises an inner circular profile taken along a cross-sectionperpendicular to the first elongated axis.

Embodiment 8

The fluid distributor of any one of embodiments 1-7, where the secondconduit comprises an inner circular profile taken along a cross-sectionperpendicular to the second elongated axis.

Embodiment 9

The fluid distributor of any one of embodiments 1-8, where a secondorifice of the second plurality of orifices comprises an orifice axisthat can be perpendicular to the second elongated axis. An angle betweenthe direction of the orifice axis of the first orifice of the secondplurality of orifices and a direction of the orifice axis of the secondorifice of the second plurality of orifices is in a range from about 45°to about 180°.

Embodiment 10

The fluid distributor of embodiment 9, where the angle between thedirection of the orifice axis of the first orifice of the secondplurality of orifices and the direction of the orifice axis of thesecond orifice of the second plurality of orifices is in a range fromabout 90° to about 135°.

Embodiment 11

The fluid distributor of any one of embodiments 1-8, where a secondorifice of the second plurality of orifices comprises an orifice axisthat can be perpendicular to the second elongated axis. The orifice axisof the first orifice of the second plurality of orifices and the orificeaxis of the second orifice of the second plurality of orifices extendsalong a first common plane that can be perpendicular to the secondelongated axis.

Embodiment 12

The fluid distributor of any one of embodiments 1-8, where a secondorifice of the second plurality of orifices may comprise a secondorifice cross-sectional flow area. The first orifice of the secondplurality of orifices comprises a first orifice cross-sectional flowarea. The first orifice of the second plurality of orifices may becloser to an inlet of the first conduit than the second orifice of thesecond plurality of orifices. The second orifice cross-sectional flowarea can be greater than the first orifice cross-sectional flow area.

Embodiment 13

The fluid distributor of any one of embodiments 1-8, where a secondorifice of the second plurality of orifices may comprise a secondorifice cross-sectional flow area. The first orifice of the secondplurality of orifices may comprise a first orifice cross-sectional flowarea that can be substantially equal to the second orificecross-sectional flow area.

Embodiment 14

The fluid distributor of any one of embodiments 1-13, where a secondorifice of the first plurality of orifices comprises an orifice axisextending perpendicular to the first elongated axis. A third orifice ofthe first plurality of orifices comprises an orifice axis extendingperpendicular to the first elongated axis. The orifice axis of the firstorifice of the first plurality of orifices is spaced a first distancefrom the orifice axis of the second orifice of the first plurality oforifices. The orifice axis of the third orifice of the first pluralityof orifices is spaced a second distance from the orifice axis of thesecond orifice of the first plurality of orifices. The first distancemay be substantially equal to the second distance.

Embodiment 15

The fluid distributor of embodiment 14, where the orifice axis of thefirst orifice of the first plurality of orifices, the orifice axis ofthe second orifice of the first plurality of orifices, and the orificeaxis of the third orifice of the first plurality of orifices extendalong a second common plane containing the first elongated axis.

Embodiment 16

The fluid distributor of any one of embodiments 1-13, where the firstelongated axis is coincident with the second elongated axis.

Embodiment 17

The fluid distributor of embodiment 16, where a second orifice of thefirst plurality of orifices comprises an orifice axis extendingperpendicular to the first elongated axis. The orifice axis of the firstorifice of the first plurality of orifices is spaced a first distancefrom the orifice axis of the first orifice of the second plurality oforifices. The orifice axis of the second orifice of the first pluralityof orifices is spaced a second distance from the orifice axis of thesecond orifice of the first plurality of orifices. The first distancecan be substantially equal to the second distance.

Embodiment 18

The fluid distributor of any one of embodiments 1-13, where a secondorifice of the first plurality of orifices comprises a second orificecross-sectional flow area. The first orifice of the first plurality oforifices may comprise a first orifice cross-sectional flow area. Thefirst orifice of the first plurality of orifices is closer to an inletof the first conduit than the second orifice of the first plurality oforifices. The second cross-sectional flow area can be greater than thefirst cross-sectional flow area.

Embodiment 19

The fluid distributor of any one of embodiments 1-13, where a secondorifice of the first plurality of orifices comprises a second orificecross-sectional flow area. The first orifice of the first plurality oforifices comprises a first orifice cross-sectional flow area that can besubstantially equal to the second cross-sectional flow area.

Embodiment 20

A method of distributing fluid with the fluid distributor of any one ofembodiments 1-19 may comprising flowing the fluid within the first flowarea of the first conduit. The method may also comprise flowing thefluid through orifices of the first plurality of orifices. The methodmay also comprise flowing the fluid through the second flow area of thesecond conduit. The method may also comprise flowing the fluid throughorifices of the second plurality of orifices. The method may alsocomprise reacting the fluid with a metal to form a product. The methodmay also comprise depositing the product on a substrate to form a layerof the product on the substrate.

Embodiment 21

The method of distributing fluid of embodiment 20, where a first massflow rate through the first orifice of the second plurality of orificesis within about 3% of a second mass flow rate through a second orificein the second plurality of orifices.

Embodiment 22

The method of distributing fluid of embodiment 21, where the first massflow rate is substantially equal to the second mass flow rate.

Embodiment 23

The method of distributing fluid of any one of embodiments 20-22, wherethe fluid comprises at least one of argon, neon, helium, krypton.

Embodiment 24

The method of distributing fluid of any one of embodiments 20-23, wherethe fluid comprises oxygen.

Embodiment 24

The method of distributing fluid of any one of embodiments 20-24, wherethe fluid comprises nitrogen.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and advantages of embodiments of thepresent disclosure are better understood when the following detaileddescription is read with reference to the accompanying drawings, inwhich:

FIG. 1 is a schematic view of a deposition apparatus comprising a fluiddistributor, according to one or more embodiments;

FIG. 2 is cross-sectional view of a fluid distributor, according to oneor more embodiments;

FIG. 3 is a cross-sectional view of a fluid distributor along line 3-3of FIG. 2, according to one or more further embodiments;

FIG. 4 is a cross-sectional view of a fluid distributor along line 3-3of FIG. 2, according to other embodiments;

FIG. 5 shows the normalized mass flow rate through orifices in fluiddistributors with different ratios between a combined cross-sectionalflow area of a plurality of orifices of a conduit and a flow area of aconduit;

FIG. 6 shows mass flow rate deviations through a first set of secondorifices in a first fluid distributor, according the embodimentsdisclosed herein;

FIG. 7 shows the mass flow rate deviations through a second set ofsecond orifices in a first fluid distributor, according the embodimentsdisclosed herein;

FIG. 8 shows mass flow rate deviations through a first set of secondorifices in a second fluid distributor, according the embodimentsdisclosed herein; and

FIG. 9 shows the mass flow rate deviations through a second set ofsecond orifices in a second fluid distributor, according the embodimentsdisclosed herein.

DETAILED DESCRIPTION

Embodiments will now be described more fully hereinafter with referenceto the accompanying drawings in which example embodiments are shown.Whenever possible, the same reference numerals are used throughout thedrawings to refer to the same or like parts. However, claims mayencompass many different aspects of various embodiments and should notbe construed as limited to the embodiments set forth herein.

Throughout the disclosure, the drawings are used to emphasize certainaspects. As such, it should not be assumed that the relative size of thedifferent layers, coatings, portions, and substrates shown in thedrawings are proportional to its actual relative size, unless explicitlyindicated otherwise.

By way of example, FIG. 1 schematically illustrates a depositionapparatus 101. The deposition apparatus 101 comprises a fluiddistributor 103, 401. As shown in FIGS. 2-4, the fluid distributor 103,401 can comprise a first conduit 203 extending along a first elongatedaxis 204 (extending into and out of the page in FIG. 2) for a firstlength 311. As shown, the first elongated axis 204 can comprise acentral axis of the first conduit 203. In some embodiments, the firstlength 311 can comprise the overall length of the first conduit 203 andmay be about 0.01 meters (m) or more, about 0.1 m or more, about 0.5 mor more, about 10 m or less, about 5 m or less, or about 1 m or less. Insome embodiments, the first length 311 may comprise the overall lengthof the first conduit 203 and may be in a range from 0.01 m to about 10m, from about 0.01 m to about 5 m, from about 0.01 m to about 1 m from0.1 m to about 10 m, from about 0.1 m to about 5 m, from about 0.1 m toabout 1 m, from about 0.5 m to about 10 m, from about 0.5 m to about 5m, from about 0.5 m to about 1 m, or any range or subrange therebetween.

Throughout the disclosure, the portion of the first conduit 203 closestto the inlet 301 of the fluid distributor 103, 401 is considered to thebe the be beginning of the first conduit 203. As used herein, if aproperty continuously increases along the length of the first conduit203, then the property increases as the distance from the inlet 301 ofthe fluid distributor 103, 401 in the direction of the first elongatedaxis 204 increases. As shown in FIGS. 2-4, the first conduit 203comprises an inner surface 208 and an outer surface 210 with a thicknessa thickness 209 defined between the inner surface 208 and the outersurface 210 in a direction perpendicular to the first elongated axis204. In some embodiments, as shown in FIGS. 3-4, the thickness 209 maybe substantially the same along the length of the first conduit 203. Inother embodiments, although not shown, the thickness 209 of the firstconduit 203 may vary along its length. In further embodiments, thethickness 209 of the first conduit 203 may decrease (e.g., monotonicallydecrease) along its length. In other further embodiments, the thickness209 of the first conduit 203 may increase (e.g., monotonically increase)along its length. Throughout the disclosure, a value that monotonicallyincreases along a length never decreases; however, the value mayincrease or alternate between remaining the same and increasing alongthe length. Throughout the disclosure, a value that monotonicallydecreases along a length never increases; however, the value maydecrease or alternate between remaining the same and decreasing alongthe length.

In some embodiments, the thickness 209 of the first conduit 203 may beabout 0.5 millimeters (mm) or more, about 1 mm or more, about 5 mm ormore, about 10 mm or more, about 30 mm or more, about 50 mm or more,about 500 mm or less, or about 100 mm or less. In some embodiments, thethickness 209 of the first conduit 203 may be in a range from about 0.5mm to about 500 mm, from about 0.5 mm to about 100 mm, from about 1 mmto about 500 mm, from about 1 mm to about 100 mm, from about 5 mm toabout 500 mm, from about 5 mm to about 100 mm, from about 10 mm to about500 mm, from about 10 mm to about 100 mm, from about 30 mm to about 500mm, from about 30 mm to about 100 mm, from about 50 mm to about 500 mm,from about 50 mm to about 100 mm, or any range or subrange therebetween.In some embodiments, as shown in FIGS. 3-4, there may be a first cap 310at the end of the first conduit 203 opposite the inlet 301.

The first conduit 203 comprises a width 205 at every point along itslength that is perpendicular to the first elongated axis 204. As usedherein, the width 205 is the distance between a first point on the innersurface 208 of the first conduit 203 and a second point on the innersurface 208 of the first conduit 203, where the first point and thesecond point are as far apart as possible and both the first point andthe second point are in a common plane perpendicular to the firstelongated axis 204. In some embodiments, as shown in FIGS. 3-4, thewidth 205 may be substantially the same along the length of the firstconduit 203. In other embodiments, although not shown, the width of thefirst conduit 203 may increase (e.g., monotonically increase) along thelength of the first conduit 203. In other embodiments, although notshown, the width of the first conduit 203 may decrease (e.g.,monotonically decrease) along the length of the first conduit 203. Thefirst conduit 203 comprises a maximum width. As used herein, a maximumwidth of the first conduit 203 is the greatest value of the width acrossall the points along the length of the first conduit 203. In someembodiments, the width 205 and/or the maximum width of the first conduit203 may be about 0.1 mm or more, 0.4 mm or more, about 1 mm or more,about 3 mm or more, about 10 mm or more, about 20 mm or more, about 50mm or more, about 5 m or less, or about 1 m or less. In someembodiments, the width 205 and/or the maximum width of the first conduit203 may be in a range from about 0.1 mm to about 5 m, 0.1 mm to about 1m, from about 0.1 mm to about 5 m, 0.4 mm to about 1 m, from about 1 mmto about 5 m, from about 1 mm to about 1 m, from about 3 mm to about 5m, from about 3 mm to about 1 m, from about 10 mm to about 5 m, fromabout 10 mm to about 1 m, from about 20 mm to about 5 m, from about 20mm to about 1 m, from about 50 mm to about 5 m, from about 50 mm toabout 1 m, or any range or subrange therebetween.

In some embodiments, as shown in FIGS. 1-2, the inner surface 208 of thefirst conduit 203 may comprise a profile perpendicular to the firstelongated axis 204 that is circular. In such embodiments, the width 205and/or maximum width may be a diameter of the circular cross-sectionalprofile of the inner surface 208. In other embodiments, the innersurface 208 of the first conduit 203 may comprise a profileperpendicular to the first elongated axis 204 that is any closed shape(e.g., triangular, quadrilateral, hexagonal, octagonal, or otherpolygonal shape). In some embodiments, the outer surface 210 of thefirst conduit 203 may comprise a profile perpendicular to the firstelongated axis 204 that is substantially the same shape as thecorresponding profile of the inner surface 208. In some embodiments, theouter surface 210 of the first conduit 203 may comprise a profileperpendicular to the first elongated axis 204 that is any closed shape(e.g., circular, triangular, quadrilateral, hexagonal, octagonal, or anyother polygonal shape).

The first conduit 203 comprises a first plurality of orifices 215 a-h,403 a-h. In some embodiments, as shown in FIGS. 3-4, the number oforifices in the first plurality of orifices may be 8, although greateror less than 8 orifices may be provided in further embodiments. In someembodiments, as shown in FIGS. 3-4, the first plurality of orifices 215a-h, 403 a-h may be contained in a plane containing the first elongatedaxis 204. The orifice axis of one or more of the first plurality oforifices 215 a-h, 403 a-h can be perpendicular to the first elongatedaxis 204 and can contain a point on the first elongated axis 204. Asshown in FIGS. 3-4, the orifice axes of all of the first plurality oforifices 215 a-h, 403 a-h can be perpendicular to the first elongatedaxis 204 and can contain a point on the first elongated axis 204. Insome embodiments, the orifice axis of one or more of the first pluralityof orifices 215 a-h, 403 a-h can comprise a central orifice axis of theorifice. For example, as shown, the orifice axes of all of the firstplurality of orifices 215 a-h, 403 a-h can comprise a central orificeaxis of the orifice.

An orifice of the first plurality of orifices 215 a-h, 403 a-h comprisesa corresponding orifice cross-sectional flow area. Throughout thedisclosure, a cross-sectional area of an orifice is defined as the areaof a cross-section of the corresponding orifice in a plane perpendicularto the corresponding orifice axis. Throughout the disclosure, theorifice cross-sectional flow area is defined as the minimumcross-sectional area of the corresponding orifice of all of thecross-sectional areas for the corresponding orifice along the orificeaxis. In some embodiments, as shown in FIGS. 3-4, the cross-sectionalarea of an orifice may be substantially the same along the correspondingorifice axis. In other embodiments, although not shown, thecross-sectional area of an orifice may increase (e.g., monotonicallyincrease) as the corresponding cross-section is further from the firstelongated axis 204. In some embodiments, the orifice can be flared. Inother embodiments, although not shown, the cross-sectional area of anorifice may decrease (e.g., monotonically decrease) as the correspondingcross-section is further from the first elongated axis 204. In someembodiments, the orifice can be tapered.

In some embodiments, as shown in FIG. 3, each of the orifices of thefirst plurality of orifices 215 a-h may comprise substantially the sameorifice cross-sectional flow area. In other embodiments, as shown inFIG. 4, a first orifice (e.g., 403 a) of the first plurality of orificescloser to the inlet 301 of the fluid distributor 401 may have a smallercross-sectional flow area than a second orifice (e.g., 403 h) of thefirst plurality of orifices further from the inlet 301 of the fluiddistributor 401. In further embodiments, as shown in FIG. 4, the orificecross-sectional flow area of the corresponding orifice may increase(e.g., monotonically increase) as the distance of the correspondingorifice axis from the inlet 301 of the fluid distributor 401 increases.Throughout the disclosure, the first combined cross-sectional flow areais defined as the sum of the orifice cross-sectional flow area of eachorifice in the first plurality of orifices. For example, with referenceto FIG. 3, the first combined cross-sectional flow area is equal to thesum of the orifice cross-sectional flow area of each orifice of thefirst plurality of orifices 215 a-h.

In some embodiments, as shown in FIGS. 3-4, a first distance between anorifice axis of a first orifice (e.g., 215 a, 403 a) of the firstplurality of orifices 215 a-h, 403 a-h and an orifice axis of a secondorifice (e.g., 215 b, 403 b) of the first plurality of orifices 215 a-h,403 a-h adjacent to the first orifice may be substantially equal to asecond distance between the orifice axis of the second orifice (e.g. 215b, 403 b) and an orifice axis of a third orifice (e.g., 215 c, 403 c) ofthe first plurality of orifices 215 a-h, 403 a-h adjacent to the secondorifice. In further embodiments, as shown in FIGS. 3-4, the distancebetween every pair of orifice axes corresponding to pairs of adjacentorifices in the first plurality of orifices 215 a-h, 403 a-h may besubstantially equal. In other embodiments, although not shown, thedistance between orifices axes corresponding to adjacent orifices in thefirst plurality of orifices may decrease (e.g., monotonically decrease)as a distance between the pair of orifice axes of the adjacent orificesand the inlet 301 of the fluid distributor 103, 401 increases. In otherembodiments, although not shown, the distance between orifices axescorresponding to adjacent orifices in the first plurality of orificesmay increase (e.g., monotonically increase) as a distance between thepair of orifice axes of the adjacent orifices and the inlet 301 of thefluid distributor 103, 401 increases. In further embodiments, a firstdistance between an orifice axis of a first orifice of the firstplurality of orifices and an orifice axis of a second orifice of thefirst plurality of orifices adjacent to the first orifice may be lessthan a second spacing between the orifice axis of the second orifice andan orifice axis of a third orifice of the first plurality of orificesadjacent to the second orifice, where the orifice axis of the firstorifice is closer to the inlet 301 of the fluid distributor 103, 401than the orifice axis of the third orifice.

Throughout the disclosure, the cross-sectional area of the first conduit203 is defined as the area of a cross-section of the first conduit 203bounded by the inner surface 208 and/or a projection of the innersurface 208 across the entrance of one or more orifices of the firstplurality of orifices in a plane perpendicular to the first elongatedaxis 204. Throughout the disclosure, the first cross-sectional flow areais defined as the cross-sectional area of the first conduit 203 for aplane closest to the inlet 301 of the fluid distributor 103, 401 thatcontains an orifice axis of an orifice of the first plurality oforifices. For example, with reference to FIG. 3, the firstcross-sectional flow area is the cross-sectional area of the firstconduit 203 measured in a plane perpendicular to the first elongatedaxis 204, where the plane contains the orifice axis of the orifice 215 aof the first plurality of orifices 215 a-h closest to the inlet 301 ofthe fluid distributor 103. In some embodiments, the firstcross-sectional flow area may be about 0.08 mm² or more, about 0.8 mm²or more, about 8 mm² or more, about 80 mm² or more, about 800 mm² ormore, about 80 m² or less, about 8 m² or less, or about 1 m² or less. Insome embodiments, the first cross-sectional flow area may be in a rangefrom about 0.08 mm² to about 80 m², from about 0.08 mm² to about 8 m²,from about 0.08 mm² to about 1 m², from about 0.8 mm² to about 80 m²,from about 0.8 mm² to about 8 m², from about 0.8 mm² to about 1 m², fromabout 8 mm² to about 80 m², from about 8 mm² to about 8 m², from about 8mm² to about 1 m², from about 80 mm² to about 80 m², from about 80 mm²to about 8 m², from about 80 mm² to about 1 m², from about 800 mm² toabout 80 m², from about 800 mm² to about 8 m², from about 800 mm² toabout 1 m², or any range or subrange therebetween.

Throughout the disclosure, a first ratio is defined as the firstcross-sectional flow area (of the first conduit 203) divided by thefirst combined cross-sectional flow area (of the first plurality oforifices). In some embodiments, the first ratio may be about 2 or more,about 2.5 or more, about 3 or more, about 4 or more, about 5 or more,about 100 or less, about 20 or less, or about 10 or less. In someembodiments, the first ratio can be in a range from about 2 to about100, from about 2 to about 20, from about 2 to about 10, from about 2.5to about 100, from about 2.5 to about 20, from about 2.5 to about 10, 3to about 100, from about 3 to about 20, from about 3 to about 10, fromabout 4 to about 100, from about 4 to about 20, from about 4 to about10, from about 5 to about 100, from about 5 to about 20, from about 5 toabout 10, or any range or subrange therebetween.

The fluid distributor 103, 401 further comprises a second conduit 201.As shown in FIGS. 1-4, the second conduit 201 circumscribes the firstconduit 203. As shown in FIGS. 3-4, the second conduit extends for asecond length 309 along a second elongated axis 206. As shown, thesecond elongated axis 206 can comprise a central axis of the secondconduit 201. In some embodiments, although not shown, the second length309 may be equal to the first length 311. In other embodiments, shown inFIGS. 3-4, the second length 309 of the second conduit 201 may begreater than the first length 311 of the first conduit 203. In suchembodiments, as shown in FIGS. 3-4, it can be preferable to cap 310 thefirst conduit. In further embodiments, the second length 309 may begreater than the first length 311 by about 1 mm or more, about 10 mm ormore, about 100 mm or more, about 5 m or less, about 2 m or less, about1 m or less. In further embodiments, the difference between the secondlength 309 and the first length 311 may be in a range from about 1 mm toabout 5 m, from about 1 mm to about 2 m, from about 1 mm to about 1 mm,from about 10 mm to about 5 m, from about 10 mm to about 2 m, from about10 mm to about 1 m, from about 100 mm to about 5 m, from about 100 mm toabout 2 mm, from about 100 mm to about 1 mm, or any ranges and subrangestherebetween. In some embodiments, as shown in FIGS. 3-4, there may be asecond cap 305 at the end of the second conduit 201 opposite the inlet301. In some embodiments, as shown in FIGS. 3-4, there may be a thirdcap 307 at the end of the second conduit 201 that is closest to or, asshown, defines the inlet 301. In further embodiments, the firstelongated axis 204 may be parallel with the second elongated axis 206.

In some embodiments, as shown in FIGS. 2-4, the first elongated axis 204may be coincident with the second elongated axis 206. In otherembodiments, the first elongated axis 204 may not be coincident with thesecond elongated axis 206 but may extend at an angle relative to thesecond elongated axis 206 wherein an angle of greater than 0° existsbetween the first elongated axis 204 and the second elongated axis 206.In further embodiments, an angle between the first elongated axis 204and the second elongated axis 206 may be about 1° or more, about 2° ormore, about 5° or more, about 30° or less, about 20° or less, or about10°. In further embodiments, an angle between the first elongated axis204 and the second elongated axis 206 can be in a range from greaterthan 0° to about 30°, from greater than 0° to about 20°, from greaterthan 0° to about 10°, from about 1° to about 30°, from about 1° to about20°, from about 1° to about 10°, from about 2° to about 30°, from about2° to about 20°, from about 2° to about 10°, from about 5° to about 30°,from about 5° to about 20°, from about 5° to about 10°, or any range orsubrange therebetween. In other further embodiments, the angle betweenthe first elongated axis 204 and the second elongated axis 206 may beless than about 1°.

As used herein, if a property continuously increases along the length ofthe second conduit 201, then the property increases as the distance fromthe inlet 301 of the fluid distributor 103, 401 increases. As shown inFIGS. 2-4, the second conduit 201 comprises an inner surface 218 and anouter surface 220 with a thickness a thickness 211 defined between theinner surface 218 and the outer surface 220 in a direction perpendicularto the second elongated axis 206. In some embodiments, as shown in FIGS.3-4, the thickness 211 may be substantially the same along the length ofthe second conduit 201. In other embodiments, although not shown, thethickness 211 of the second conduit 201 may vary along its length. Infurther embodiments, the thickness 211 of the second conduit 201 maydecrease (e.g., monotonically decrease) along its length. In otherfurther embodiments, the thickness 211 of the second conduit 201 mayincrease (e.g., monotonically increase) along its length. In someembodiments, the thickness 211 of the second conduit 201 may be about0.5 millimeters (mm) or more, about 1 mm or more, about 5 mm or more,about 10 mm or more, about 30 mm or more, about 50 mm or more, about 500mm or less, or about 100 mm or less. In some embodiments, the thickness211 of the second conduit 201 may be in a range from about 0.5 mm toabout 500 mm, from about 0.5 mm to about 100 mm, from about 1 mm toabout 500 mm, from about 1 mm to about 100 mm, from about 5 mm to about500 mm, from about 5 mm to about 100 mm, from about 10 mm to about 500mm, from about 10 mm to about 100 mm, from about 30 mm to about 500 mm,from about 30 mm to about 100 mm, from about 50 mm to about 500 mm, fromabout 50 mm to about 100 mm, or any range or subrange therebetween.

The second conduit 201 comprises a width 207 at every point along itslength that is perpendicular to the second elongated axis 206. As usedherein, the width 207 is the distance between a first point on the innersurface 218 of the second conduit 201 and a second point on the innersurface 218 of the second conduit 201, where the first point and thesecond point are as far apart as possible and both the first point andthe second point are in a common plane perpendicular to the secondelongated axis 206. In some embodiments, as shown in FIGS. 3-4, thewidth 207 may be substantially the same along the length of the secondconduit 201. In other embodiments, although not shown, the width of thesecond conduit 201 may increase (e.g., monotonically increase) along thelength of the second conduit 201. In other embodiments, although notshown, the width of the second conduit 201 may decrease (e.g.,monotonically decrease) along the length of the second conduit 201. Thesecond conduit 201 comprises a maximum width. As used herein, a maximumwidth of the second conduit 201 is the greatest value of the width 207across all the points along the length of the second conduit 201. Themaximum width of the second conduit 201 is greater than the maximumwidth of the first conduit 203 in order for the second conduit 201 tocircumscribe the first conduit 203. In some embodiments, the width 207and/or the maximum width of the second conduit 201 may be about 1 mm ormore, about 3 mm or more, about 10 mm or more, about 20 mm or more,about 50 mm or more, about 5 m or less, or about 1 m or less. In someembodiments, the width 207 and/or the maximum width of the secondconduit 201 may be in a range from about 1 mm to about 5 m, from about 1mm to about 1 m, from about 3 mm to about 5 m, from about 3 mm to about1 m, from about 10 mm to about 5 m, from about 10 mm to about 1 m, fromabout 20 mm to about 5 m, from about 20 mm to about 1 m, from about 50mm to about 5 m, from about 50 mm to about 1 m, or any range or subrangetherebetween.

In some embodiments, as shown in FIGS. 1-2, the inner surface 218 of thesecond conduit 201 may comprise a profile perpendicular to the secondelongated axis 206 that is circular. In such embodiments, the width 207and/or maximum width may be a diameter of the circular cross-sectionalprofile of the inner surface 218. In other embodiments, the innersurface 218 of the first conduit 203 may comprise a profileperpendicular to the second elongated axis 206 that is any closed shape(e.g., triangular, quadrilateral, hexagonal, octagonal, or any otherpolygonal shape). In some embodiments, the outer surface 220 of thesecond conduit 201 may comprise a profile perpendicular to the secondelongated axis 206 that is substantially the same shape as thecorresponding profile of the inner surface 218. In some embodiments, theouter surface 220 of the second conduit 201 may comprise a profileperpendicular to the second elongated axis 206 that is any closed shape(e.g., circular, triangular, quadrilateral, hexagonal, octagonal, or anyother polygonal shape).

The second conduit 201 comprises a second plurality of orifices 219 a-g,221 a, 405 a-g. In some embodiments, as shown in FIG. 3, the secondplurality of orifices can comprise a first set of orifices 219 a-g thatmay be contained in a plane containing the second elongated axis 206. Insome embodiments, as shown in FIGS. 3-4, the number of orifices in afirst set of the second plurality of orifices may be 7 although thefirst set of the second plurality of orifices may comprise greater thanor less than 7 orifices in further embodiments. In some embodiments, theorifice axis of one or more of the second plurality of orifices 219 a-g,221 a, 405 a-g can be perpendicular to the second elongated axis 206 andcan contain a point on the second elongated axis 206. For example, asshown, the orifice axes of all of the second plurality of orifices 219a-g, 221 a, 405 a-g can be perpendicular to the second elongated axis206 and can contain a point on the second elongated axis 206. In someembodiments, the orifice axis of one or more of the second plurality oforifices 219 a-g, 221 a, 405 a-g can comprise a central orifice axis ofthe orifice. For example, as shown, the orifice axes of all of thesecond plurality of orifices 219 a-g, 221 a, 405 a-g can comprise acentral orifice axis of the orifice.

An orifice of the second plurality of orifices 219 a-g, 221 a, 405 a-gcomprises a corresponding orifice cross-sectional flow area. In someembodiments, as shown in FIG. 4, the orifices of the second plurality oforifices 405 a-g may comprise substantially the same orificecross-sectional flow area. In other embodiments, as shown in FIG. 3, afirst orifice (e.g., 219 a) of the second plurality of orifices 219 a-gcloser to the inlet 301 of the fluid distributor 103 may have a smallercross-sectional flow area than a second orifice (e.g., 219 b) of theplurality second orifices 219 a-g further from the inlet 301 of thefluid distributor 103 than the first orifice 219 a. In furtherembodiments, as shown in FIG. 3, the orifice cross-sectional flow areamay increase (e.g., monotonically increase) as the distance of thecorresponding orifice axis of each orifice of the plurality secondorifices 219 a-g increases from the inlet 301 of the fluid distributor103. Throughout the disclosure, a second combined cross-sectional flowarea is defined as the sum of the orifice cross-sectional flow area ofeach orifice in the second plurality of orifices.

Throughout the disclosure, a second ratio is defined as the firstcombined cross-sectional flow area of the first plurality of orificesdivided by the second combined cross-sectional flow area of the secondplurality of orifices. In some embodiments, the second ratio may beabout 2 or more, 3 or more, about 4 or more, about 5 or more, about 100or less, about 20 or less, or about 10 or less. In some embodiments, thefirst ratio can be in a range from about 2 to about 100, about 2 toabout 20, about 2 to about 10, about 3 to about 100, from about 3 toabout 20, from about 3 to about 10, from about 4 to about 100, fromabout 4 to about 20, from about 4 to about 10, from about 5 to about100, from about 5 to about 20, from about 5 to about 10, or any range orsubrange therebetween.

In some embodiments, as shown in FIGS. 2-3, one or more orifices of thesecond plurality of orifices 219 a-g, 221 a may comprise an extension213 a-g that increases the length of the orifice by an extension length214 a (see FIG. 2) beyond the thickness 211 of the second conduit 201.In some embodiments, the extension length 214 a may be about 1 mm ormore, 10 mm or more, 40 mm or more, 1,000 mm or less, 100 mm or less, or60 mm or less. In some embodiments, the extension length 214 a may be ina range from about 1 mm to about 1,000 mm, from about 1 mm to about 100mm, from about 1 mm to about 60 mm, from about 10 mm to about 1,000 mm,from about 10 mm to about 100 mm, from about 10 mm to about 60 mm, fromabout 40 mm to about 1,000 mm, from about 40 mm to about 100 mm, fromabout 40 mm to about 60 mm, or any range or subrange therebetween. Inother embodiments, one or more of the orifices of the second pluralityof orifices 405 a-g may not have an extension. For example, as shown inFIG. 4, none of the orifices of the second plurality of orifices 405 a-ghave an extension. It is to be understood the presence or absence of anextension 213 a-g can be combined with the relationships between theorifices of the first plurality of orifices (e.g., equal distance,increasing, monotonically increasing, decreasing, monotonicallydecreasing) discussed above.

In some embodiments, as shown in FIGS. 3-4, a first distance between anorifice axis of a first orifice (e.g., 219 a, 405 a) of the first set oforifices 219 a-g, 405 a-g of the second plurality of orifices 219 a-g,221 a, 403 a-g and an orifice axis of a second orifice (e.g., 219 b, 405b) of the first set of orifices 219 a-g, 405 a-g of the second pluralityof orifices 219 a-g, 221 a, 405 a-g adjacent to the first orifice in adirection of the second elongated axis 206 may be substantially equal toa second distance between the orifice axis of the second orifice (e.g.219 b, 405 b) and an orifice axis of a third orifice (e.g., 219 c, 405c) of the first set of orifices 219 a-g, 405 a-g of the second pluralityof orifices 219 a-g, 221 a, 405 a-g adjacent to the second orifice in adirection of the second elongated axis 206. In further embodiments, asshown in FIGS. 3-4, the distance between a pair of orifice axescorresponding to pairs of adjacent orifices in the first set of orifices219 a-g, 405 a-g of the second plurality of orifices 219 a-g, 221 a, 405a-g may be substantially equal. In other embodiments, although notshown, the distance between orifices axes corresponding to adjacentorifices in the first set of orifices in the second plurality oforifices may decrease (e.g., monotonically decrease) as a distancebetween the pair of orifice axes of the adjacent orifices and the inlet301 of the fluid distributor 103, 401 increases. In other embodiments,although not shown, the distance between orifices axes corresponding toadjacent orifices in the first set of orifices in the second pluralityof orifices may increase (e.g., monotonically increase) as a distancebetween the pair of orifice axes of the adjacent orifices and the inlet301 of the fluid distributor 103, 401 increases. In further embodiments,a first distance between an orifice axis of a first orifice of the firstset of orifices of the second plurality of orifices and an orifice axisof a second orifice of the first set of orifices of the second pluralityof orifices adjacent to the first orifice may be less than a secondspacing between the orifice axis of the second orifice and an orificeaxis of a third orifice of the first set of orifices the secondplurality of orifices adjacent to the second orifice, where the orificeaxis of the first orifice is closer to the inlet 301 of the fluiddistributor 103, 401 than is the orifice axis of the third orifice. Itshould be understood that the different relationships between theorifices in the first set of orifices of the second plurality oforifices (e.g., equal distance, increasing, monotonically increasing,decreasing, monotonically decreasing) can be combined with differentrelationships between the orifices of the first plurality of orifices(e.g., equal distance, increasing, monotonically increasing, decreasing,monotonically decreasing) and the presence or absence of an extension213 a-g, as discussed above.

In some embodiments, as shown in FIG. 2 in the dashed lines andindicated at 219 a′, the second plurality of orifices 219 a-g may onlycomprise a first set of orifices. Alternatively, in some embodiments, asshown in FIGS. 1-2 in the solid lines, the second plurality of orifices219 a-g, 221 a, 405 a-g may further comprise a second set of orifices.In some embodiments, as shown in FIGS. 1-2, an orifice 221 a of thesecond set of orifices may be at substantially the same location on thesecond elongated axis 206 as an orifice 219 a of the first set oforifices 219 a-g. In further embodiments, as shown in FIGS. 1-2, a firstorifice 219 a of the first set of orifices 219 a-g may be in a commonplane with a second orifice 221 a of the second set of orifices 221 a,where the common plane is perpendicular to the second elongated axis206.

In further embodiments, although not shown, each orifice of the set oforifices including the orifice 221 a may be at substantially the samelocation on the second elongated axis 206 as a corresponding orifice ofthe first set of orifices 219 a-g. In further embodiments, the number oforifices in the second set of orifices comprising the orifice 221 a maybe the same as the number of orifices in the first set of orifices 219a-g. In other embodiments, the number of orifices in the second set oforifices comprising the orifice 221 a may be less than the number oforifices in the first set of orifices 219 a-g. In some embodiments, anorifice of the second set of orifices may be staggered along the secondelongated axis 206 from an orifice of the first set of orifices. In someembodiments, although not shown, the second plurality of orifices maycomprise more than two sets of orifices.

Throughout the disclosure, an angle between an orifice axis of a firstorifice and an orifice axis of a second orifice is defined as thesmallest angle (i.e., from 0° to 180°) between the orifice axes. Forexample, with reference to FIG. 2, an angle between an orifice 219 a ofthe first set of orifices of the second plurality of orifices 219 a-g,221 a and an orifice 221 a of the second set of orifices of the secondplurality of orifices 219 a-g, 221 a is defined as the angle between theorifice axis of the orifice 219 a of the first set of orifices and theorifice axis of the orifice 221 a of the second set of orifices. In someembodiments, the angle between the orifice axis of the orifice 219 a ofthe first set of orifices and the orifice axis of the orifice 221 a ofthe second set of orifices can be about 15° or more, about 30° or more,about 45° or more, about 60° or more, about 75° or more, about 90° ormore, about 180° or less, about 165° or less, about 150° or less, orabout 135° or less. In some embodiments, the angle between the orificeaxis of the orifice 219 a of the first set of orifices and the orificeaxis of the orifice 221 a of the second set of orifices can be in arange from about 45° to about 180°, from about 45° to about 165°, fromabout 45° to about 150°, from about 45° to about 135°, from about 60° toabout 180°, from about 60° to about 165°, from about 60° to about 150°,from about 60° to about 135°, from about 75° to about 180°, from about75° to about 165°, from about 75° to about 150°, from about 75° to about135°, from about 90° to about 180°, from about 90° to about 165°, fromabout 90° to about 150°, from about 90° to about 135°, or any range orsubrange therebetween. In further embodiments, the angle between eachorifice of the first set of orifices 219 a-g and the correspondingorifice of the second set of orifices containing the orifice 221 a canbe within the ranges set forth above and may be identical to oneanother. In some embodiments, the angle between orifices of the secondplurality or orifices 219 a-g, 221 a, 405 a-g may be determined by thearrangement of the rest of the deposition apparatus 101.

Throughout the disclosure, a second cross-sectional flow area of thesecond conduit 201 is defined as a cross section of a second flow areabound between: (1) the inner surface 218 of the second conduit 201and/or a projection of the inner surface 218 across the entrance of oneor more orifices of the second plurality of orifices 219 a-g, 221 a, 405a-g in a plane perpendicular to the second elongated axis 206, and (2)the outer surface 210 of the first conduit 203 and/or a projection ofthe outer surface 210 across the exit of one or more orifices of thefirst plurality of orifices 215 a-h, 403 a-h in a plane perpendicular tothe first elongated axis 204. Throughout the disclosure, the secondcross-sectional flow area is defined as the cross-sectional area of thesecond conduit 201 for a plane closest to the inlet 301 of the fluiddistributor 103, 401 that contains an orifice axis of an orifice of thefirst plurality of orifices. For example, with reference to FIG. 3, thesecond cross-sectional flow area is the cross-sectional area boundbetween the first conduit 203 and the second conduit 201 measured in aplane perpendicular to the second elongated axis 206, where the planecontains the orifice axis of the orifice 215 a of the first plurality oforifices 215 a-h closest to the inlet 301 of the fluid distributor 103.

In some embodiments, the second cross-sectional flow area may be about0.03 mm² or more, about 0.3 mm² or more, about 3 mm² or more, about 30mm² or more, about 300 mm² or more, about 30 m² or less, about 3 m² orless, or about 1 m² or less. In some embodiments, the firstcross-sectional flow area may be in a range from about 0.03 mm² to about30 m², from about 0.03 mm² to about 3 m², from about 0.03 mm² to about 1m², from about 0.3 mm² to about 30 m², from about 0.3 mm² to about 3 m²,from about 0.3 mm² to about 1 m², from about 3 mm² to about 30 m², fromabout 3 mm² to about 3 m², from about 3 mm² to about 1 m², from about 30mm² to about 30 m², from about 30 mm² to about 3 m², from about 30 mm²to about 1 m², from about 300 mm² to about 30 m², from about 300 mm² toabout 3 m², from about 300 mm² to about 1 m², or any range or subrangetherebetween.

As shown in FIG. 2, an angle “A” between an orifice axis 227 a firstorifice 215 a of the first plurality of orifices 215 a-h and an orificeaxis 225, 229 of a second orifice 219 a, 221 a of the second pluralityof orifices 219 a-g, 221 a can be about 15° or more, about 30° or more,about 45° or more, about 60° or more, about 75° or more, about 90° ormore, about 180° or less, about 165° or less, about 150° or less, orabout 135° or less. In further embodiments, the angle “A” can be in arange from about 45° to about 180°, from about 45° to about 165°, fromabout 45° to about 150°, from about 45° to about 135°, from about 60° toabout 180°, from about 60° to about 165°, from about 60° to about 150°,from about 60° to about 135°, from about 75° to about 180°, from about75° to about 165°, from about 75° to about 150°, from about 75° to about135°, from about 90° to about 180°, from about 90° to about 165°, fromabout 90° to about 150°, from about 90° to about 135°, or any range orsubrange therebetween. A similar angle “A” may also exist between theorifice axis of any of the orifices 219 a-g and an orifice axis of anyof the orifices 215 a-h. Still further, a similar angle “A” may alsoexist between the orifice axis of an orifice of the second set oforifices 221 a of the second plurality of orifices 219 a-g, 221 a, 405a-g and an orifice axis of an orifice of the first plurality of orifices403 a-h. In some further embodiments, the similar angle “A” for thefirst set of orifices 405 a-g may be different than the angle “A” of thesecond set of orifices 221 a. In other further embodiments, the similarangle “A” for the first set of orifices 405 a-g may be substantially thesame as the angle “A” of the second set of orifices 221 a. In otherembodiments, as shown in FIG. 2 in dashed lines, the angle between theorifice axis 227 of the orifice 215 a or the first plurality of orifices215 a-h, 403 a-h and the orifice 219 a′ of a second plurality oforifices can be about 180° and/or within a range from about 45° to about180° or from about 170° to about 180°.

In some embodiments, as shown in FIGS. 3-4, an orifice axis of anorifice of the first plurality of orifices 215 a-h, 403 a-h may bestaggered with respect to an orifice axis of an orifice of the secondplurality of orifices 219 a-g, 405 a-g in the direction of the firstelongated axis 204 and/or second elongated axis 206 by a staggerdistance 223. In even further embodiments, the stagger distance 223 maybe about 10 mm or more, about 30 mm or more, about 500 mm or less, about200 mm or less, about 100 mm or less, or about 50 mm or less. In evenfurther embodiments, the stagger distance may be in a range from about10 mm to about 500 mm, from about 10 mm to about 200 mm, from about 10mm to about 50 mm, from about 30 mm to about 500 mm, from about 30 mm toabout 200 mm, from about 30 mm to about 50 mm, or any range or subrangetherebetween. In some embodiments, as shown in FIGS. 3-4, an orifice 215a of the first plurality of orifices 215 a-h closest to the inlet 301 ofthe fluid distributor 103, 401 may be offset from the inlet 301 of thefluid distributor 103, 401 by an offset distance 221. In someembodiments, the offset distance 221 may be about 1 mm or more, about 10mm or more, about 40 mm or more, about 200 mm or less, about 100 mm orless, or about 80 mm or less. In some embodiments, the offset distance221 may be in arrange from about 1 mm to about 200 mm, from about 1 mmto about 100 mm, from about 1 mm to about 80 mm, from about 10 mm toabout 200 mm, from about 10 mm to about 100 mm, from about 10 mm toabout 80 mm, from about 40 mm to about 200 mm, from about 40 mm to about100 mm, from about 40 mm to about 80 mm, or any range or subrangetherebetween.

In some embodiments, as shown in FIGS. 3-4, a first distance 313 abetween an orifice axis of a first orifice (e.g., 215 a, 403 a) of thefirst plurality of orifices 215 a-h, 403 a-h and an orifice axis of asecond orifice (e.g., 219 a, 405 a) of the second plurality of orifices219 a-g, 221 a, 405 a-g adjacent to the first orifice may besubstantially equal to a second distance 313 b between the orifice axisof the second orifice (e.g. 219 b, 405 b) and an orifice axis of a thirdorifice (e.g., 215 c, 403 c) of the first plurality of orifices 215 a-h,403 a-h adjacent to the second orifice. In further embodiments, althoughnot shown, the distance between every pair of orifice axes correspondingto pairs of adjacent orifices in the first plurality of orifices 215a-h, 403 a-h may be bisected by at least one orifice of the secondplurality of orifices 219 a-g, 221 a, 405 a-g, meaning that an orificeof the second plurality of orifices 219 a-g, 221 a, 405 a-g is equallyspaced from a pair of adjacent orifices of the first plurality oforifices 215 a-h, 403 a-h.

As shown in FIGS. 1-4, in some embodiments, providing the fluiddistributor 103, 401 with the first cap 310 on the first conduit 203,the second cap 305 on the second conduit 201, and the third cap 307 onthe second conduit may promote a more uniform pressure distributionthroughout the second flow area, which further promotes a more uniformdistribution of material exiting the second conduit 201 through thesecond plurality of orifices 219 a-g, 221 a, 405 a-g.

In some embodiments, the first conduit 203 and the second conduit 201may comprise the same material although the first and second conduitsmay be comprised of different materials in further embodiments. Thematerials of the conduits may comprise any material that is compatiblewith the fluid to be distributed by the fluid distributor 103. Forinstance, the material of the first conduit 203 and/or the secondconduit 201 may comprise metal, plastic, or glass-based materials.Examples of suitable metal materials include cast iron, wrought iron,lacquered iron, carbon steel, stainless steel, galvanized steel, chromeplated brass, aluminum, copper, titanium, and lead. Examples of suitablepolymers comprise, without limitation, the following includingcopolymers and blends thereof: thermoplastics including polystyrene(PS), polycarbonate (PC), polyesters including polyethyleneterephthalate(PET) or polyoxymethylene (POM), polyolefins including polyethylene(PE), polyvinylchloride (PVC), acrylic polymers including polymethylmethacrylate (PMMA), thermoplastic urethanes (TPU), polyetherimide(PEI), epoxies, and silicones including polydimethylsiloxane (PDMS). Asused herein, “glass-based” includes both glasses and glass-ceramics,wherein glass-ceramics have one or more crystalline phases and anamorphous, residual glass phase. Glass-based materials may comprise anamorphous material (e.g., glass) and optionally one or more crystallinematerials (e.g., ceramic). Amorphous materials and glass-based materialsmay be thermally or chemically strengthened. Examples of glass-basedmaterials, which may be free of lithia or not, comprise soda lime glass,alkali aluminosilicate glass, alkali containing borosilicate glass,alkali alumniophosphosilicate glass, and alkali aluminoborosilicateglass. It may be preferable to use a material that is corrosionresistant and non-reactive with the fluids to be flowed through thefluid distributor 103, 401. As such, preferable first materials (of thefirst conduit) and/or second materials (of the second conduit) mayinclude ultra-high molecular weight polyethylene (UHMWPE), cross-linkedpolyethylene (PEX), and chlorinated PVC (CPVC), and lacquered iron.

In some embodiments, an orifice can be generated in a conduit usingmolding techniques. In other embodiments, an orifice can be generated ina conduit using hot embossing. In still other embodiments, an orificecan be generated in a conduit using a drill, rotary blade, orreciprocating blade. In such embodiments, it may be preferable to removeany residual material at the edges of the created orifice using adeburring technique. In yet other embodiments, an orifice can begenerated using a laser cutting technique.

A mixture of fluids may be fed into the inlet 301 of the fluiddistributor 103, 401. Examples of fluids include liquids and gases.Gases may comprise a carrier gas 303 a, a reactant gas 303 b, andoptionally a metallic gas. In some embodiments, a carrier gas 303 a maycomprise a non-reactive gas, for example, argon, neon, helium, orkrypton. In some embodiments, a reactant gas 303 b may comprise a gasrich in oxygen, for example, diatomic oxygen, a nitrous oxide (e.g.,dinitrogen oxide, nitrogen dioxide, etc.), water vapor, hydrogenperoxide, and carbon dioxide. In some embodiments, a reactant gas 303 bmay comprise a gas rich in nitrogen, for example, diatomic nitrogen, anitrous oxide (e.g., dinitrogen oxide, nitrogen dioxide, etc.), urea,and ammonium nitrate. In further embodiments, it may be desirable forthe reactant gas 303 b to be rich in both oxygen and nitrogen, forexample, diatomic oxygen, diatomic nitrogen, and/or a nitrous oxide(e.g., dinitrogen oxide, nitrogen dioxide, etc.). Optionally, in someembodiments, a metallic gas may include silane, aluminum hydride,titanium hydride, magnesium hydride, silicon vapor, aluminum vapor,titanium vapor, and magnesium vapor. In embodiments without a metallicgas, a metal source 107 a, 107 b will preferably be present, asdiscussed below.

In some embodiments, as shown in FIG. 1, the second plurality oforifices 219 a-g, 221 a, 405 a-g of the fluid distributor 103, 401 willface an ionizer 105 a, 105 b. The ionizer 105 a, 105 b may comprise aninductively coupled plasma, one or more laser beams tuned to absorptionspectra of the reactant gas 303 b and/or metallic gas, or an electronbeam. In embodiments with a metallic gas, the ionized reactant gas andmetallic gases will react to form a product in the gas phase that can bedeposited. In embodiments without a metallic gas, as shown in FIG. 1,the ionized reactant gas can impact a metal source 107 a, 107 b to forma product, removing material for the metal source 107 a, 107 b bysputtering. Examples of suitable metallic sources include aluminummetal, silicon wafers, magnesium metal, zirconium, and titanium metal.

The deposition apparatus 101 comprises a substrate 113, where theproduct will be deposited. In some embodiments, as shown in FIG. 1, thesubstrate 113 may be mounted on a drum 109 that is rotated in a rotationdirection 111 during the deposition to enable multiple substrates 113 tobe coated in a relatively uniform manner. In further embodiments, thesubstrate 113 may comprise a plurality of coupons arranged in a rowand/or array that can correspond to an article. In some embodiments, thesubstrate 113 may comprise a silicon wafer or a glass-based material.For example, an article may include sunglass lenses, RF transparentbackings or housings of smartphones and similar devices, cover glassarticles for smartphones and/or smart watches, heads-up display systems,automotive windows, mirrors, display surfaces, architectural glass andsurfaces, and other decorative, optical, display, or protectiveapplications. Such displays can include liquid crystal displays (LCDs),electrophoretic displays (EPD), organic light emitting diode displays(OLEDs), plasma display panels (PDPs), and touch sensors. Otherembodiments of articles can include automotive glass for windows,sunroofs, or lamp covers. An article may comprise a transparent layer,for example, an amorphous inorganic material (e.g., glass), acrystalline material (e.g., sapphire, single crystal or polycrystallinealumina, spinel (MgAl₂O₄), or a polymer. Examples of suitable polymersinclude, without limitation, copolymers and blend thereof:thermoplastics including polystyrene (PS), polycarbonate (PC),polyesters including polyethyleneterephthalate (PET), polyolefinsincluding polyethylene (PE), polyvinylchloride (PVC), acrylic polymersincluding polymethyl methacrylate (PMMA), thermoplastic urethanes (TPU),polyetherimide (PEI), epoxies, silicones including polydimethylsiloxane(PDMS), and blends of these polymers with each other. Examples of glass,which may be strengthened or non-strengthened and may be free of lithiaor not, include soda lime glass, alkali aluminosilicate glass, alkalicontaining borosilicate glass and alkali aluminoborosilicate glass. Asused herein, the term “strengthened” when applied to a substrate, forexample glass or another transparent layer, may refer to a substratethat has been chemically strengthened, for example through ion-exchangeof larger ions for smaller ions in the surface of the substrate.However, other strengthening methods known in the art, for examplethermal tempering, or utilizing a mismatch of the coefficient of thermalexpansion between portions of the substrate to create compressive stressand central tension regions, may be utilized to form strengthenedsubstrates.

In some embodiments, the product to be deposited on the substrate 113may comprise a metal oxide, a metal nitride, or a metal oxynitride.Examples of metal oxides include Al₂O₃, ZrO₂, SiO₂, Al₂O₃, SiO, MgO,MgAl₂O₄, and TiO₂. Examples of metal nitrides include AlN, Si₃N₄, ZrN,and Mg₃N₂. Examples of metal oxynitrides include AlO_(x)N_(y),SiO_(x)N_(y), Si_(u)Al_(v)O_(x)N_(y), TiO_(x)N_(y). Exemplary preferredAlO_(x)N_(y) higher refractive index materials may comprise from about 0atom % to about 20 atom % oxygen, or from about 5 atom % to about 15atom % oxygen, while including 30 atom % to about 50 atom % nitrogen.Exemplary preferred Si_(u)Al_(v)O_(x)N_(y) higher refractive indexmaterials may comprise from about 10 atom % to about 30 atom % or fromabout 15 atom % to about 25 atom % silicon, from about 20 atom % toabout 40 atom % or from about 25 atom % to about 35 atom % aluminum,from about 0 atom % to about 20 atom % or from about 1 atom % to about20 atom % oxygen, and from about 30 atom % to about 50 atom % nitrogen.The foregoing materials may be hydrogenated up to about 30% by weight.These products may be deposited as one or more of scratch-resistant,anti-glare, and/or high-hardness layers. The average thickness of thedeposited layer can be controlled by tuning the reaction time, inputpressures, and the rotation speed of the drum 109. In some embodiments,the average thickness of the surface coating may be in the range fromabout 200 nanometers (nm) to about 5 mm, from about 200 nm to about 1mm, from about 200 nm to about 500 μm, from about 500 nm to about 5 mm,from about 500 nm to about 1 mm, from about 500 nm to about 500 μm, fromabout 500 nm to about 100 μm, from about 500 nm to about 20 μm, fromabout 1 μm to about 5 mm, from about 1 μm to about 1 mm, from about 1 μmto about 500 μm, from about 1 μm to about 200 μm, from about 1 μm toabout 100 μm, from about 1 μm to about 50 μm from about 1 μm to about 20μm, from about 1 μm to about 10 μm, or from about 1 μm to about 5 μm.

The fluid distributor 103, 401, in accordance with the embodiments ofthe disclosure, can be used as part of the deposition apparatus 101 in amethod of depositing a product on a substrate 113. First, fluids whichmay comprise a carrier gas 303 a, a reactant gas 303 b, and optionally ametallic gas are flowed through the inlet 301 of the fluid distributor103, 401. Then, the fluid can be flowed within the first flow area ofthe first conduit 203. The fluid can then be flowed through the orificesof the first plurality of orifices 215 a-h, 403 a-h into the second flowarea of the second conduit 201. Then, the fluid can be flowed throughthe second flow area of the second conduit 201. The fluid may be flowedthrough orifices of the second plurality of orifices 219 a-g, 221 a, 405a-g. In some embodiments, the mass-flow rate of the fluid through theorifices may differ by about 3% or less. In further embodiments, themass flow rate through each orifice of the second plurality of orificesmay be substantially equal. Then, the reactant(s) in the fluid arereacted with a metal to form a product. In some embodiments, the metalmay be from a metal source 107 a, 107 b. In other embodiments, the metalmay be ionized from a metallic gas. Then, the product may be depositedon the substrate 113 to form a layer of the product on the substrate113.

In some embodiments, the first ratio may be greater than the secondratio. A technical benefit of fluid distributor 103, 401 of thedisclosed herein is that it can achieve a substantially uniform steadystate pressure distribution in the second flow area. Since the firstratio is at least about 2 or more, 2.5 or more, or 3.0 or more there issufficient fluid volume within the first conduit 203 to compensate forvariations in the fluid input (e.g., 303 a, 303 b) pressure and/or massflow rate as well as variations in the ambient conditions in the rest ofthe deposition apparatus 101 that is incorporated into. This reduces thedynamic (e.g., time evolving) variation in the mass flow rate leavingthe fluid distributor 103, 401, which contributes to a more uniformstoichiometry and a more uniform thickness of the product layerdeposited on the substrate 113. Similarly, since the second ratio is atleast about 2 or more, 2.5 or more, or 3.0 or more, the fluiddistributor can compensate for variations in the in the ambientconditions in the rest of the deposition apparatus 101 that isincorporated into. Additionally, the different reactant gas(es) 303 band carrier gas(es) 303 a may be well-mixed by the time the fluid flowsthrough the second plurality of orifices 219 a-g, 221 a, 405 a-g becausethe conduit-in-conduit design increases the average travel path for thefluid compared to a single conduit fluid distributor. Mixing may befurther promoted when the first plurality of orifices faces away fromthe second plurality of orifices. Practically, this means that the anglebetween an orifice of the first plurality of orifices and an orifice ofthe second plurality of orifices is within a range from 45° and 180° andmore preferably from 90° to about 180°. When the first plurality oforifices faces away from the second plurality of orifices, there is nodirect momentum transfer from the fluid flowing through the firstplurality of orifices to the fluid flowing through the second pluralityof orifices because the fluid reorients and diffuses before leaving thesecond flow area.

In some embodiments, substantially the same fluid distribution for agiven set of ratios may be obtained for a different set of smallerratios without departing from the spirit and scope of this disclosure.For example, nozzles may be attached to the first plurality of orificesand/or the extension length of the second plurality of orifices isincreased. Examples of nozzles include throttles and one-way valves. Athrottle may be used to effectively reduce the cross-sectional area ofan orifice. A one-way value may be used to prevent back-flow andrecirculation within the fluid distributor. Embodiments employing thesedevices can be especially desirably when retrofitting an existing fluiddistributor with non-ideal ratio(s). Similarly, one may attachextensions to the first plurality of orifices and/or extend theextension length of the second plurality of orifices to compensate forfluid distributors with non-ideal ratios. Such embodiments modify theeffective resistance to flow of the corresponding orifice(s) of thefirst and/or second plurality of orifices such that the distributor hasthe same behavior as another distributor with a different ratio. One candetermine an “effective” ratio by measuring the pressure drop across thefirst plurality of orifices and second plurality of orifices withnozzles and/or extensions and comparing those values to other fluiddistributors with a larger ratio for the plurality of orifices that wasmodified under the same conditions. Alternatively, a loss coefficient orresistance coefficient analogous to that used in fluid dynamics forminor head loss could be used to determine an “effective” area ratio.Without wishing to be bound by theory, such modifications may producepressure drops proportional to the product of the density of the fluidand the velocity of the fluid squared.

As discussed above, the fluid distributor 103, 405 of the currentdisclosure can achieve a more uniform mass flow rate across the secondplurality of orifices than other fluid distributor designs. FIG. 5 showsthe normalized mass flow rate through orifices in fluid distributorswith different ratios between a combined cross-sectional flow area of aplurality of orifices of a conduit and a flow area of a conduit. Allfluid distributors shown in FIG. 5 comprise an outer conduit (i.e., thesecond conduit as used in this disclosure) comprising two sets of sevenorifices. The vertical axis represents a normalized mass flow rate. Thehorizontal axis represents a length of the conduit with the location ofan orifice marked by a symbol. A modeled normalized mass flow rateversus length of a traditional, single-conduit fluid distributor with afirst ratio of about 0.66 is represented by plot 501 having variationsof more than 70%. A modeled normalized mass flow rate versus length of atraditional, single-conduit fluid distributor with a first area ratio ofabout 2.6 is represented by plot 503 and has variations of about 20%. Amodeled normalized mass flow rate versus length of a traditional,single-conduit fluid distributor with a first area ratio of about 5.2about 5.2 is represented by plot 505 and has variations of about 10%. Amodeled normalized mass flow rate versus length of a traditional,single-conduit fluid distributor with a first area ratio of about 9.8 isrepresented by plot 507 and has a variation less than 5%. This modeledresults demonstrate that the area ratio, with a first area ratio ofabout 2.0 or more and 2.5 or more are associated with variations ofabout 20% or less. However, the single-conduit fluid distributor shownin FIG. 5 does not produce well-mixed fluids. The conduit-in-conduitexample embodiments discussed below produce well-mixed fluids.

Example A

The mass flow rates leaving a first set of orifices and a second set oforifices of the second plurality of orifices according to embodimentsdisclosed herein are shown in FIGS. 6 and 7, respectively. The verticalaxis represents the % deviation from the average mass flow rate. Eachbar along the horizontal axis corresponds to an orifice in thecorresponding set of orifices of the second plurality of orifices in adirection of the length of the second conduit away from the inlet. Thefirst conduit comprised a first length of 680 mm with a circular profilecomprising an inner diameter of about 4.55 mm, corresponding to a firstcross-sectional flow area of 6.28 mm². The first conduit furthercomprised eight orifices. Each orifice was circular with a diameter of 1mm, corresponding to a first combined cross-sectional flow area of about16.26 mm², and was spaced 80 mm apart with a 60 mm offset on each end.The second conduit comprised a second length of 730 mm with a circularprofile comprising an inner diameter about 10.25 mm and two sets ofseven orifices in the second plurality of orifices. Each orifice of thesecond plurality of orifices formed an angle of 112° with the firstplurality of orifices. Each pair of second orifices (one from the firstset of the second plurality of orifices and one from the second set ofthe second plurality of orifices) bisected the spacing between anadjacent pair of orifices of the second plurality of orifices. The firstconduit comprised a thickness of about 0.9 mm and the second conduitcomprised a thickness of about 1.25 mm. The second plurality of orificescomprised an extension length of 3 mm and comprised a circularcross-section with a diameter of about 0.5 mm, corresponding to a secondcombined cross-sectional flow area of 1.37 mm². Both conduits werecapped, and the conduits were coincident. Thus, this embodiment ofExample A corresponds to a first ratio of about 2.59 and a second ratioof about 4.58. Both ratios are about 2.0 or more and about 2.50 or more.Here, the first ratio is less than the second ratio. In FIG. 6, themaximum peak-to-peak deviation in the mass flow rate is about 2.1%between the second orifice and the fifth orifice. In FIG. 7, the maximumpeak-to-peak deviation is 2.83% between the first orifice and the secondorifice. All of the orifices are within about 1.5% of the mean mass flowrate, which is significantly better than the single-conduit example witha corresponding area ratio that had about 20% deviations (see FIG. 5,plot 503 and associated description).

Example B

The mass flow rates leaving a first set or orifices and a second set oforifices of the second plurality of orifices according to embodimentsdisclosed herein are shown in FIGS. 8 and 9, respectively. The verticalaxis represents the % deviation from the average mass flow rate. Eachbar along the horizontal axis corresponds to an orifice in thecorresponding set of orifices of the second plurality of orifices in adirection of the length of the second conduit away from the inlet. Thefirst conduit comprised a first length of 680 mm with a circular profilecomprising an inner diameter of about 4.55 mm, corresponding to a firstcross-sectional flow area of 16.26 mm². The first conduit furthercomprised eight orifices. Each orifice was circular, but the dimeter thefirst plurality of orifices monastically increased moving away from theinlet with corresponding values of 0.5 mm, 0.5 mm, 0.6 mm, 0.6 mm, 0.7mm, 0.7 mm, 1.0 mm, 1.0 mm. This corresponds to a first combinedcross-sectional flow area of about 3.30 mm², and each orifice was spaced80 mm apart with a 60 mm offset on each end. The second conduitcomprised a second length of 730 mm with a circular profile comprisingan inner diameter about 10.25 mm and two sets of seven orifices in thesecond plurality of orifices. Each orifice of the second plurality oforifices formed an angle of 112° with the first plurality of orifices.Each pair of second orifices (one from the first set of the secondplurality of orifices and one from the second set of the secondplurality of orifices) bisected the spacing between an adjacent pair oforifices of the first plurality of orifices. The first conduit compriseda thickness of about 0.9 mm and the second conduit comprised a thicknessof about 1.25 mm. The second plurality of orifices comprised anextension length of 3 mm and comprised a circular cross-section with adiameter of about 0.5 mm, corresponding to a second combinedcross-sectional flow area of 1.37 mm². Both conduits were capped, andthe conduits were coincident. Thus, this embodiment of Example Bcorresponds to a first ratio of about 4.93 and a second ratio of about2.41. Both ratios are about 2.0 or more. The first ratio is greater thanthe second ratio. Also, the second ratio is about 2.0 or more, about 2.5or more, about 3 or more, and about 4 or more. In FIG. 8, the maximumpeak-to-peak deviation in the mass flow rate is about 0.37% between thesecond orifice and the seventh orifice. In FIG. 9, the maximumpeak-to-peak deviation is 0.80% between the first orifice and theseventh orifice. All of the orifices are within about 1.5% of the meanmass flow rate, which is significantly better than the single-conduitexample with a corresponding area ratio that had about 20% deviations(see FIG. 5, plot 503 and associated description). Despite the secondratio being smaller in Example B than in Example A, the peak-to-peakdeviation significantly decreased because the first ratio was greaterthan the second ratio in Example B but not in Example A.

As used herein, the term “disposing” includes coating, depositing and/orforming a material onto a surface using any known method in the art. Thedisposed material may constitute a layer, as defined throughout thedisclosure. The phrase “disposed on” includes embodiments of forming amaterial onto a surface such that the material is in direct contact withthe surface and also includes embodiments where the material is formedon a surface, with one or more intervening material(s) positionedbetween the disposed material and the surface. In some of theembodiments, the intervening material(s) may constitute one or morelayers.

Throughout the disclosure, the term “layer” may include a single layeror may include one or more sub-layers. In some embodiments, a stack ofsub-layers may be provided with each sub-layer in the stack being indirect contact with at least one other sub-layer in the stack. Suchsub-layers may be in direct contact with one another. The sub-layers maybe formed from the same material or two or more different materials. Inone or more alternative embodiments, such sub-layers may haveintervening layers of different materials disposed therebetween. In oneor more embodiments, a layer may include one or more contiguous anduninterrupted layers. A layer or sub-layers may be formed by varioustechniques, for example discrete deposition and/or continuous depositionprocesses. In one or more embodiments, the layer may be formed usingonly continuous deposition processes, or, alternatively, only discretedeposition processes.

As used herein the terms “the,” “a,” or “an,” mean “at least one,” andshould not be limited to “only one” unless explicitly indicated to thecontrary. Thus, for example, reference to “a component” includesembodiments having two or more such components unless the contextclearly indicates otherwise.

As used herein, the term “about” means that amounts, sizes,formulations, parameters, and other quantities and characteristics arenot and need not be exact, but may be approximate and/or larger orsmaller, as desired, reflecting tolerances, conversion factors, roundingoff, measurement error and the like, and other factors known to those ofskill in the art. When the term “about” is used in describing a value oran end-point of a range, the disclosure should be understood to includethe specific value or end-point referred to. Whether or not a numericalvalue or end-point of a range in the specification recites “about,” thenumerical value or end-point of a range is intended to include twoembodiments: one modified by “about,” and one not modified by “about.”It will be further understood that the endpoints of each of the rangesare significant both in relation to the other endpoint, andindependently of the other endpoint.

The terms “substantial,” “substantially,” and variations thereof as usedherein are intended to note that a described feature is equal orapproximately equal to a value or description. For example, a“substantially planar” surface is intended to denote a surface that isplanar or approximately planar. Moreover, as defined above,“substantially similar” is intended to denote that two values are equalor approximately equal. In some embodiments, “substantially similar” maydenote values within about 10% of each other, for example within about5% of each other, or within about 2% of each other.

The above embodiments, and the features of those embodiments, areexemplary and can be provided alone or in any combination with any oneor more features of other embodiments provided herein without departingfrom the scope of the disclosure.

It will be apparent to those skilled in the art that variousmodifications and variations can be made to the present disclosurewithout departing from the spirit and scope of the disclosure. Thus, itis intended that the present disclosure cover the modifications andvariations of this disclosure provided they come within the scope of theappended claims and their equivalents.

What is claimed is:
 1. A fluid distributor comprising: a first conduitextending along a first elongated axis, the first conduit comprising afirst plurality of orifices comprising a first combined cross-sectionalflow area, a first flow area comprising a first cross-sectional flowarea taken perpendicular to the first elongated axis, a first ratio ofthe first cross-sectional area to the first combined cross-sectionalflow area is about 2 or more, and a first orifice of the first pluralityof orifices comprises an orifice axis that is perpendicular to the firstelongated axis; and a second conduit extending along a second elongatedaxis, the second conduit circumscribing the first conduit to define asecond flow area between the first conduit and the second conduit, thesecond conduit comprising a second plurality of orifices comprising asecond combined cross-sectional flow area, a second ratio of the firstcombined cross-sectional flow area of the first plurality of orifices tothe second combined cross-sectional flow area of the second plurality oforifices is about 2 or more, and a first orifice of the second pluralityof orifices comprises an orifice axis that is perpendicular to thesecond elongated axis, wherein a first angle between a direction of theorifice axis of the first orifice of the first plurality of orifices anda direction of the orifice axis of the first orifice of the secondplurality of orifices is in a range from about 45° to about 180°; andwherein a second orifice of the second plurality of orifices comprises asecond orifice cross-sectional flow area, the first orifice of thesecond plurality of orifices comprises a first orifice cross-sectionalflow area, the first orifice of the second plurality of orifices iscloser to an inlet of the first conduit than the second orifice of thesecond plurality of orifices, and the second orifice cross-sectionalflow area is greater than the first orifice cross-sectional flow area.2. The fluid distributor of claim 1, wherein the first ratio is greaterthan the second ratio.
 3. The fluid distributor of claim 1, wherein thefirst angle is in a range from about 90° to about 180°.
 4. The fluiddistributor of claim 1, wherein the first angle is in a range from about90° to about 135°.
 5. The fluid distributor of claim 1, wherein thefirst angle is in a range from about 170° to about 180°.
 6. The fluiddistributor of claim 1, wherein the first plurality of orifices arestaggered relative to the second plurality of orifices in a direction ofthe first elongated axis.
 7. The fluid distributor of claim 1, whereinthe first conduit comprises an inner circular profile taken along across-section perpendicular to the first elongated axis.
 8. The fluiddistributor of claim 1, wherein the second conduit comprises an innercircular profile taken along a cross-section perpendicular to the secondelongated axis.
 9. The fluid distributor of claim 1, wherein the secondorifice of the second plurality of orifices comprises an orifice axisthat is perpendicular to the second elongated axis, an angle between thedirection of the orifice axis of the first orifice of the secondplurality of orifices and a direction of the orifice axis of the secondorifice of the second plurality of orifices is in a range from about 45°to about 180°.
 10. The fluid distributor of claim 9, wherein the anglebetween the direction of the orifice axis of the first orifice of thesecond plurality of orifices and the direction of the orifice axis ofthe second orifice of the second plurality of orifices is in a rangefrom about 90° to about 135°.
 11. The fluid distributor of claim 1,wherein the second orifice of the second plurality of orifices comprisesan orifice axis that is perpendicular to the second elongated axis, theorifice axis of the first orifice of the second plurality of orificesand the orifice axis of the second orifice of the second plurality oforifices extend along a first common plane perpendicular to the secondelongated axis.
 12. The fluid distributor of claim 1, wherein a secondorifice of the first plurality of orifices comprises an orifice axisextending perpendicular to the first elongated axis, a third orifice ofthe first plurality of orifices comprises an orifice axis extendingperpendicular to the first elongated axis, the orifice axis of the firstorifice of the first plurality of orifices is spaced a first distancefrom the orifice axis of the second orifice of the first plurality oforifices, the orifice axis of the third orifice of the first pluralityof orifices is spaced a second distance from the orifice axis of thesecond orifice of the first plurality of orifices, and the firstdistance is substantially equal to the second distance.
 13. The fluiddistributor of claim 12, wherein the orifice axis of the first orificeof the first plurality of orifices, the orifice axis of the secondorifice of the first plurality of orifices, and the orifice axis of thethird orifice of the first plurality of orifices extend along a secondcommon plane containing the first elongated axis.
 14. The fluiddistributor of claim 1, wherein the first elongated axis is coincidentwith the second elongated axis.
 15. The fluid distributor of any one ofclaim 14, wherein a second orifice of the first plurality of orificescomprises an orifice axis extending perpendicular to the first elongatedaxis, the orifice axis of the first orifice of the first plurality oforifices is spaced a first distance from the orifice axis of the firstorifice of the second plurality of orifices, the orifice axis of thesecond orifice of the first plurality of orifices is spaced a seconddistance from the orifice axis of the second orifice of the firstplurality of orifices, and the first distance is substantially equal tothe second distance.
 16. The fluid distributor of claim 1, wherein asecond orifice of the first plurality of orifices comprises a secondorifice cross-sectional flow area, the first orifice of the firstplurality of orifices comprises a first orifice cross-sectional flowarea that is substantially equal to the second cross-sectional flowarea.
 17. The fluid distributor of claim 1, wherein the first pluralityof orifices are contained in a plane containing the first elongate axis.